School on Nanotech
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| ROOM 10 | ||
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September 22-23-24 |
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The School will be held both REMOTELY and IN PERSON |
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| Chairs: Vittorio MORANDI, CNR-IMM & Lorenza FERRARIO - CV, FBK | ||||||||||
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The course is dedicated to Master degree and Ph.D students, as well as to scientists working in the wide field of micro- and nano-technology, offering the opportunity to learn about fundamentals on processes, devices fabrication and characterization processes, with attention to both planar and 3D technologies. Besides the lectures dedicated to single technology steps, building blocks of the silicon-based micro- and nano-fabrication technologies, there will be sessions dedicated to devices application areas. The workshop will be completed with a demo and live sessions from different cleanrooms, to practically show some of the fundamental silicon processing steps. The school is organized by It-fab (http://itfab.bo.imm.cnr.it/), the Italian network for Micro and Nano Fabrication research infrastructures. |
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| Wednesday 22 September | ||||||||||
| 09:00 - 09:15 |
Welcome and Introduction Vittorio MORANDI, CNR-IMM, Bologna |
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| 09:15 - 09:45 | Cleanroom, introduction to the functioning Lorenza FERRARIO - CV, FBK |
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| 09:45 - 10:30 | Ionic implantation Antonino PICCIOTTO - CV, FBK |
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| 11:30 - 12:15 |
Depostion techniques 1 Riccardo BERTACCO, PoliFAB |
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| 12:15 - 13:00 | Depostion techniques 2 Claudio SOMASCHINI, PoliFAB |
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| 14:00 - 14:45 | Plasma Etching 1 Fulvio MANCARELLA - CV, CNR-IMM |
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| 14:45 - 15:30 | Plasma Etching 2 Fulvio MANCARELLA - CV, CNR-IMM |
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| 16:00 - 16:45 | Lithography 1 Massimo CUSCUNA', CNR NANOTEC |
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| 16:45 - 17:30 | Lithography 2 Massimo CUSCUNA', CNR NANOTEC |
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| Thursday 23 September |
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| 09:00 - 09:45 | Self-assembling lithography for nanoscale metrology Federico FERRARESE LUPI - CV, INRIM |
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| 09.45 - 10.30 |
Metrology in Nanotechnologies Davide CALONICO, INRIM |
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| 11:30 - 12:15 | Suspended structures: patterning and release Ilaria GELMI, STMicroelectronics |
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| 12:15 - 13:00 | When 3D process integration turns into 3D optical sensing Emmanuel JOSSE - CV, STMicroelectronics |
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| 14:00 - 14:45 | Technology Platform 2 - Organic electronics and applications Matteo RAPISARDA - CV, CNR-IMM, Roma |
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| 14:45 - 15:30 | Technology Platform 4/Scanning Probe Lithography Alessia ROMEO, PoliFAB |
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| 16:00 - 16:45 | Technology Platform 5 - Two photon polymerization 3D printing Valentina BERTANA - CV, Chilab & Polytechnic of Turin |
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| 16:45 - 17:30 | Discussion and Conclusion | |
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| Friday 24 September | ||||||||||
| 09:00 - 09:45 | LIVE DEMO - CNR NANOTEC Massimo CUSCUNA', CNR NANOTEC |
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| 09.45 - 10.30 | LIVE DEMO - SEM/FIB FBK Damiano GIUBERTONI, FBK |
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| 11:00 - 11:30 | APPLICATIONS - Applications 1: System level 3D integration and system-in-package for chemical sensing microsystems Stefano ZAMPOLLI - CV, CNR-IMM, Bologna |
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| 11:30 - 12:00 | APPLICATIONS - Applications 2: Microfluidics and biosensors Simone MARASSO - CV, Polytechnic of Turin |
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| 12:00 - 12:30 | APPLICATIONS - Applications 3: Fabrication of micro-vibrating wire strain sensors by micromachining of Silicon On Insulator substrates with wafer-level vacuum packaging Alberto RONCAGLIA, CNR-IMM |
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The School will send a certificate of participation with the programme and the total number of lessons hours. The document will be sent to registered people only and has to be requested explicitly to This email address is being protected from spambots. You need JavaScript enabled to view it.
